Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films

Alternative titles:

• J. Vac. Sci. Technol. A: Vac. Surf. Films

Publisher: Published by AVS through the American Institute of Physics

Place: New York

Identifiers:

• http://purl.org/escidoc/metadata/terms/0.1/ISSN: 0734-2101