View journals

URI: journals/resource/954928495416 Journal Name: Journal of Vacuum Science and Technology BAlternative Journal Name: J. Vac. Sci. Techn. BAlternative Journal Name: JVST BIdentifier:  Value: 0734-2101ID Type: http://purl.org/escidoc/metadata/terms/0.1/ISSNPublisher: Published by AVS through the American Institute of PhysicsPublisher Place: New York