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キーワード:
8th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, 2002-09-09 to 2002-09-13
要旨:
The article presents results of the experimental studies and theoretical description of processes that occur during modification of a Cu cathode surface in the magnetron discharge in Ar. The experimentally observed cone-like microprotrusions are classified and possible mechanisms
responsible for the growth of such formations with dimensions in the range 1–100 m are discussed.
An analytical model is proposed for the experimentally observed phenomena of growth of the
cone-like microprotrusions. We consider the case when a strong electric field in the cathode sheath
of the discharge is taken into consideration during sputtering.
