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  Fabrication of Fresnel zone plates by ion-beam lithography and application as objective lenses in extreme ultraviolet microscopy at 13 nm wavelength

Overbuschmann, J., Hengster, J., Irsen, S., & Wilhein, T. (2012). Fabrication of Fresnel zone plates by ion-beam lithography and application as objective lenses in extreme ultraviolet microscopy at 13 nm wavelength. Optics Letters, 37(24), 5100-5012.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-60CF-F Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-60D0-9
Genre: Journal Article

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Overbuschmann, J.1, Author           
Hengster, J., Author
Irsen, S.1, Author           
Wilhein, T., Author
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1Electron Microscopy and Analytics, Center of Advanced European Studies and Research (caesar), Max Planck Society, ou_2173680              

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 Dates: 2012
 Publication Status: Issued
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Title: Optics Letters
  Alternative Title : Opt. Lett.
Source Genre: Journal
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Pages: - Volume / Issue: 37 (24) Sequence Number: - Start / End Page: 5100 - 5012 Identifier: -