Thermische Zersetzung und H-induzierte Erosion dünner a-C:H Schichten

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Thermische Zersetzung und H-induzierte Erosion dünner a-C:H Schichten

Zecho, T. (2001). Thermische Zersetzung und H-induzierte Erosion dünner a-C:H Schichten. PhD Thesis, Universität Bayreuth, Bayreuth.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-4973-6 Version Permalink: https://hdl.handle.net/21.11116/0000-0006-CB59-2

Genre: Thesis

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Locator:
https://eref.uni-bayreuth.de/id/eprint/28323 (Supplementary material) Open Access status unknown

Description:
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Creators:
Zecho, T.¹, Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Language(s): deu - German

Dates: Accepted: 2001Date issued: 2001

Publication Status: Issued

Pages: -

Publishing info: Bayreuth : Universität Bayreuth

Table of Contents: -

Rev. Type: -

Identifiers: eDoc: 269935

Degree: PhD

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