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  Effective Young's Modulus Measurement of Thin Film Using Micromechanical Cantilever Sensors

Itakura, A. N., Toda, M., Miyake, K., Förch, R., & Berger, R. (2013). Effective Young's Modulus Measurement of Thin Film Using Micromechanical Cantilever Sensors. Japanese Journal of Applied Physics, 52(11): UNSP 110111. doi:10.7567/JJAP.52.110111.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0018-4AE5-3 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0018-4B25-B
Genre: Journal Article

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 Creators:
Itakura, A. N., Author
Toda, Masaya1, Author           
Miyake, K., Author
Förch, Renate2, Author           
Berger, Rüdiger3, Author           
Affiliations:
1Tohoku Univ, Grad Sch Engn, Aoba Ku, Sendai, Miyagi 9808579, Japan, ou_persistent22              
2Dept. Landfester: Physical Chemistry of Polymers, MPI for Polymer Research, Max Planck Society, ou_1800288              
3Dept. Butt: Physics at Interfaces, MPI for Polymer Research, Max Planck Society, ou_1800286              

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Language(s): eng - English
 Dates: 2013
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: DOI: 10.7567/JJAP.52.110111
 Degree: -

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Title: Japanese Journal of Applied Physics
  Abbreviation : JJAP
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: Bristol, England : IOP Publishing Ltd
Pages: - Volume / Issue: 52 (11) Sequence Number: UNSP 110111 Start / End Page: - Identifier: ISSN: 0021-4922
CoNE: https://pure.mpg.de/cone/journals/resource/0021-4922