Ion Sputter Rates and Yields for Iron-, Chromium- and Aluminium Oxide Layers

Viefhaus, Helmut; Hennesen, Klaus; Lucas, Manfred; Müller-Lorenz, Else Marie; Grabke, Hans-Jürgen

doi:10.1002/sia.740210911

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Ion Sputter Rates and Yields for Iron-, Chromium- and Aluminium Oxide Layers

Viefhaus, H., Hennesen, K., Lucas, M., Müller-Lorenz, E. M., & Grabke, H.-J. (1994). Ion Sputter Rates and Yields for Iron-, Chromium- and Aluminium Oxide Layers. Surface and Interface Analysis, 21(9), 665-672. doi:10.1002/sia.740210911.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0019-744E-3 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0023-D847-1

Genre: Journal Article

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Creators:
Viefhaus, Helmut¹, Author
Hennesen, Klaus¹, Author
Lucas, Manfred¹, Author
Müller-Lorenz, Else Marie¹, Author
Grabke, Hans-Jürgen¹, Author

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1Physical Chemistry, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society, ou_1863394

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Language(s): eng - English

Dates: Date issued: 1994-09

Publication Status: Issued

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Identifiers: eDoc: 585121
DOI: 10.1002/sia.740210911

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Title: Surface and Interface Analysis

Source Genre: Journal

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Pages: - Volume / Issue: 21 (9) Sequence Number: - Start / End Page: 665 - 672 Identifier: -