KrF excimer laser projection patterned deposition of aluminum from 
triethylamine alane as adsorbate precursor.

Foulon, F.; Stuke, M.

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KrF excimer laser projection patterned deposition of aluminum from triethylamine alane as adsorbate precursor.

Foulon, F., & Stuke, M. (1993). KrF excimer laser projection patterned deposition of aluminum from triethylamine alane as adsorbate precursor. Applied Physics Letters, 62(18), 2173-2175.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0013-0765-F Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-E023-3

Genre: Journal Article

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Creators:
Foulon, F., Author
Stuke, M.¹, Author

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1Research Group of Laser Chemical Processing, MPI for biophysical chemistry, Max Planck Society, ou_578609

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Language(s): eng - English

Dates: Date issued: 1993-05-03

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 276304
ISI: A1993LA00200007

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Title: Applied Physics Letters

Alternative Title : Appl. Phys. Lett.

Source Genre: Journal

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Pages: - Volume / Issue: 62 (18) Sequence Number: - Start / End Page: 2173 - 2175 Identifier: ISSN: 0003-6951