Influence of the Deposition Gas on the Properties of Plasma-Deposited 
Carbonized Layers

Boutard, D.; Moeller, W.

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Influence of the Deposition Gas on the Properties of Plasma-Deposited Carbonized Layers

Boutard, D., & Moeller, W. (1991). Influence of the Deposition Gas on the Properties of Plasma-Deposited Carbonized Layers. Surface and Coatings Technology, 45, s. 1-3, 353-358.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-C92E-5 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-C92F-3

Genre: Journal Article

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Creators:
Boutard, D.¹, Author
Moeller, W.², Author

Affiliations:
1External Organizations, ou_persistent22
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Dates: Date issued: 1991

Publication Status: Issued

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Title: Surface and Coatings Technology

Source Genre: Journal

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Pages: - Volume / Issue: 45, s. 1-3 Sequence Number: - Start / End Page: 353 - 358 Identifier: -