Mechanical and chemical investigation of the interface between tungsten-based 
metallizations and annealed borophosphosilicate glass

Völker, Bernhard; Heinz, Walther; Matoy, Kurt; Roth, R.; Batke, Johann Markus; Schöberl, Thomas; Cordill, Megan Jo; Dehm, Gerhard

doi:10.1016/j.tsf.2015.03.047

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Mechanical and chemical investigation of the interface between tungsten-based metallizations and annealed borophosphosilicate glass

Völker, B., Heinz, W., Matoy, K., Roth, R., Batke, J. M., Schöberl, T., et al. (2015). Mechanical and chemical investigation of the interface between tungsten-based metallizations and annealed borophosphosilicate glass. Thin Solid Films, 583, 170-176. doi:10.1016/j.tsf.2015.03.047.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0026-B626-5 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0026-B627-3

Genre: Journal Article

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Creators:
Völker, Bernhard^{1, 2}, Author
Heinz, Walther³, Author
Matoy, Kurt⁴, Author
Roth, R.⁵, Author
Batke, Johann Markus⁶, Author
Schöberl, Thomas⁷, Author
Cordill, Megan Jo⁸, Author
Dehm, Gerhard⁹, Author

Affiliations:
1KAI - Kompetenzzentrum Automobil- und Industrieelektronik GmbH, Technologiepark Villach, Europastrasse 8, 9524 Villach, Austria, ou_persistent22
2Department of Materials Physics, Montanuniversität Leoben, Austria, ou_persistent22
3Kompetenzzentrum Automobil- und Industrie-Elektronik GmbH, A-9524 Villach, Austria, ou_persistent22
4Infineon Technologies AG Austria, Villach, Austria, ou_persistent22
5Infineon Technologies AG, 9500 Villach, Austria, ou_persistent22
6Infineon Technologies AG, 93049 Regensburg, Germany, ou_persistent22
7Erich Schmid Institute of Materials Science, Austrian Academy of Sciences, A-8700 Leoben, Austria, ou_persistent22
8Erich Schmid Institute of Materials Science, Leoben, Austria, ou_persistent22
9Structure and Nano-/ Micromechanics of Materials, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society, ou_1863398

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Language(s): eng - English

Dates: Date issued: 2015-05-29

Publication Status: Issued

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Identifiers: DOI: 10.1016/j.tsf.2015.03.047

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Title: Thin Solid Films

Abbreviation : Thin Solid Films

Source Genre: Journal

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Pages: - Volume / Issue: 583 Sequence Number: - Start / End Page: 170 - 176 Identifier: ISSN: 0040-6090
CoNE: https://pure.mpg.de/cone/journals/resource/954925449792