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Abstract:
Most of the analytical technique used in thin film research are
insensitive to oxygen, and many are prone to thickness-dependent
systematic errors. Electron Probe Microanalysis (EPMA) can give
accurate analyses of thin films if sufficiently low accelerating
voltages are used. We have used the technique to study whether fine
stoichiometric changes are responsible for the quality differences that
are observed in YBa2Cu3O7-x thin films produced at different substrate
temperatures.
