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Abstract:
The influence of surface roughness on Rutherford backscattering spectroscopy (RBS) spectra has been studied experimentally and by computer simulation with the SIMNRA code. Rough thin films are described by a distribution of film thicknesses, while rough substrates are approximated by a distribution of local inclination angles. Correlation effects of surface roughness are neglected. Rough film effects can be calculated for RBS including non-Rutherford scattering, nuclear reaction analysis and elastic recoil detection analysis. The results of simulation calculations show good agreement with experimental data. For thin films of high Z elements on rough substrates additionally plural scattering plays an important role. (C) 2002 Elsevier Science B.V. All rights reserved.
