Depth resolution in sputter profiling revisited

Hofmann, Siegfried; Liu, Y.; Jian, W.; Kang, H. L.; Wang, J. Y.

doi:10.1002/sia.6039

Local TagsRelease HistoryDetailsSummary

Depth resolution in sputter profiling revisited

Hofmann, S., Liu, Y., Jian, W., Kang, H. L., & Wang, J. Y. (2016). Depth resolution in sputter profiling revisited. Surface and Interface Analysis, 48(13), 1354-1369. doi:10.1002/sia.6039.

Item is Released

show all hide all

Basic

show hide

Item Permalink: https://hdl.handle.net/11858/00-001M-0000-002D-0839-7 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-002D-083A-5

Genre: Journal Article

Files

show Files

Locators

show

Creators

show

hide

Creators:
Hofmann, Siegfried¹, Author
Liu, Y.², Author
Jian, W.², Author
Kang, H. L.², Author
Wang, J. Y.², Author

Affiliations:
1Emeriti and Others, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497650
2Department of Physics, Shantou University, 243 Daxue Road, Shantou 515063, Guangdong, China, ou_persistent22

Content

show

hide

Free keywords: Emeriti and Others

Abstract: -

Details

show

hide

Language(s): eng - English

Dates: Published Online: 2016-06-08Date issued: 2016

Publication Status: Issued

Pages: -

Publishing info: -

Table of Contents: -

Rev. Type: -

Identifiers: DOI: 10.1002/sia.6039

Degree: -

Event

show

Legal Case

show

Project information

show

Source 1

show

hide

Title: Surface and Interface Analysis

Source Genre: Journal

Creator(s):

Affiliations:

Publ. Info: New York, NY : John Wiley & Sons

Pages: - Volume / Issue: 48 (13) Sequence Number: - Start / End Page: 1354 - 1369 Identifier: ISSN: 0142-2421
CoNE: https://pure.mpg.de/cone/journals/resource/954925471358