Readout of micromechanical cantilever sensor arrays by Fabry-Perot 
interferometry

Wehrmeister, J.; Fuss, A.; Saurenbach, F.; Berger, Rüdiger; Helm, M.

doi:10.1063/1.2785028

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Readout of micromechanical cantilever sensor arrays by Fabry-Perot interferometry

Wehrmeister, J., Fuss, A., Saurenbach, F., Berger, R., & Helm, M. (2007). Readout of micromechanical cantilever sensor arrays by Fabry-Perot interferometry. Review of Scientific Instruments, 78(10): 104105. doi:10.1063/1.2785028.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-000F-7E4F-3 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0029-2697-C

Genre: Journal Article

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Creators:
Wehrmeister, J., Author
Fuss, A., Author
Saurenbach, F., Author
Berger, Rüdiger¹, Author
Helm, M., Author

Affiliations:
1MPI for Polymer Research, Max Planck Society, ou_1309545

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Language(s): eng - English

Dates: Date issued: 2007

Publication Status: Issued

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Identifiers: eDoc: 327403
Other: P-07-276
DOI: 10.1063/1.2785028

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Title: Review of Scientific Instruments

Source Genre: Journal

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Publ. Info: Melville, NY : AIP Publishing

Pages: - Volume / Issue: 78 (10) Sequence Number: 104105 Start / End Page: - Identifier: ISSN: 0034-6748
CoNE: https://pure.mpg.de/cone/journals/resource/991042742033452