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  Progress in the Development of a Large-Area RF Plasma Generator

Feist, J.-H., Miley, G., Kraus, W., Elliott, C., Speth, E., Ciric, M., et al. (1996). Progress in the Development of a Large-Area RF Plasma Generator. 16th IEEE/NPSS Symposium Fusion Engineering, Vol. 2, 976-979.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-D061-D Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-D062-B
Genre: Conference Paper

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 Creators:
Feist, J.-H.1, Author           
Miley, G.H.2, Author
Kraus, W.1, Author           
Elliott, C.2, Author
Speth, E.1, Author           
Ciric, M.1, Author           
Heinemann, B.1, Author           
Probst, F.1, 3, 4, Author           
Riedl, R.1, Author           
Institute of Electrical and Electronics Engineers, Inc., Piscataway, NJ(US), Editor              
Affiliations:
1Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856318              
2External Organizations, ou_persistent22              
3Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              
4Experimental Plasma Physics 2 (E2), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856292              

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 Dates: 1996
 Publication Status: Issued
 Pages: -
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 Rev. Type: -
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Title: SOFE '95
Place of Event: Champaign, IL(US)
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Title: 16th IEEE/NPSS Symposium Fusion Engineering
Source Genre: Journal
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Publ. Info: -
Pages: - Volume / Issue: Vol. 2 Sequence Number: - Start / End Page: 976 - 979 Identifier: -