Compositional analysis of InGaAs fins using Rutherford backscattering 
spectrometry

Laricchiuta, G.; Vandervorst, W.; Vickridge, I.; Mayer, M.; Schulze, A.; Meersschaut, J.

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Compositional analysis of InGaAs fins using Rutherford backscattering spectrometry

Laricchiuta, G., Vandervorst, W., Vickridge, I., Mayer, M., Schulze, A., & Meersschaut, J. (2018). Compositional analysis of InGaAs fins using Rutherford backscattering spectrometry. Talk presented at 9th International Workshop on High-Resolution Depth Profiling (HRDP 2018). Uppsala. 2018-06-25 - 2018-06-29.

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Item Permalink: https://hdl.handle.net/21.11116/0000-0001-E051-6 Version Permalink: https://hdl.handle.net/21.11116/0000-0001-E052-5

Genre: Talk

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Creators:
Laricchiuta, G.¹, Author
Vandervorst, W.¹, Author
Vickridge, I.¹, Author
Mayer, M.², Author
Schulze, A.¹, Author
Meersschaut, J.¹, Author

Affiliations:
1External Organizations, ou_persistent22
2Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856327

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Language(s): eng - English

Dates: Submitted: 2018

Publication Status: Submitted

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Title: 9th International Workshop on High-Resolution Depth Profiling (HRDP 2018)

Place of Event: Uppsala

Start-/End Date: 2018-06-25 - 2018-06-29

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