The Effect of Target Texture on Spatial Distribution of Sputtered Material

Zhukova, Yu.N.; Eisert, J. (Uebers. ); Mashkova, E.S.; Molchanov, V.A.; Eckstein, W.; et al.,

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The Effect of Target Texture on Spatial Distribution of Sputtered Material

Zhukova, Y., Eisert, J. (. )., Mashkova, E., Molchanov, V., Eckstein, W., & et al. (1992). The Effect of Target Texture on Spatial Distribution of Sputtered Material. Poverkhnost, 12, 19-23.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-CC33-1 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-CC34-0

Genre: Journal Article

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Creators:
Zhukova, Yu.N.¹, Author
Eisert, J. (Uebers. )¹, Author
Mashkova, E.S.¹, Author
Molchanov, V.A.¹, Author
Eckstein, W.², Author
et al.¹, Author

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1External Organizations, ou_persistent22
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Dates: Date issued: 1992

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Title: Poverkhnost

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Pages: - Volume / Issue: 12 Sequence Number: - Start / End Page: 19 - 23 Identifier: -