Enabling technologies for system-level simulation of MEMS

Bechtold, Tamara; Schrag, Gabriele; Feng, Lihong

doi:10.1109/ESTC.2014.6962795

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Enabling technologies for system-level simulation of MEMS

Bechtold, T., Schrag, G., & Feng, L. (2014). Enabling technologies for system-level simulation of MEMS. In Electronics System-Integration Technology Conference (ESTC), 2014 (pp. 1-6).

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0024-6628-E Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0025-1FF7-1

Genre: Conference Paper

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Creators:
Bechtold, Tamara¹, Author
Schrag, Gabriele², Author
Feng, Lihong³, Author

Affiliations:
1Institute for Microsystems Engineering - IMTEK, Freiburg University, Germany, ou_persistent22
2Institute for Physics of Electrotechnology, Technische Universität München, Germany, ou_persistent22
3Computational Methods in Systems and Control Theory, Max Planck Institute for Dynamics of Complex Technical Systems, Max Planck Society, ou_1738141

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Dates: Date issued: 2014

Publication Status: Issued

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Identifiers: DOI: 10.1109/ESTC.2014.6962795

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Title: Electronics System-Integration Technology Conference (ESTC 2014)

Place of Event: Helsinki, Finland

Start-/End Date: 2014-09-16 - 2014-09-18

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Title: Electronics System-Integration Technology Conference (ESTC), 2014

Source Genre: Proceedings

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Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 1 - 6 Identifier: -