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  Bistable Thin-Film Shape Memory Actuators for Applications in Tactile Displays

Vitushinsky, R., Schmitz, S., & Ludwig, A. (2009). Bistable Thin-Film Shape Memory Actuators for Applications in Tactile Displays. Journal of Microelectromechanical Systems, 18(1), 186-194.

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Vitushinsky, R., Author
Schmitz, S.1, Author           
Ludwig, A., Author
Affiliations:
1Micro Systems Technology, Center of Advanced European Studies and Research (caesar), Max Planck Society, ou_2173685              

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Free keywords: ALLOYS Bistable actuators PERFORMANCE shape memory alloys (SMAs) tactile display thin-film actuators
 Abstract: Bistable shape memory actuators were fabricated by microsystem technology processes and characterized with regard to their use in tactile graphic displays. The actuators were realized as sputter-deposited buckled metallic thin-film carriers, having structured Ti-Ni-Cu and Ti-Ni-Hf shape memory alloys on the top and at the bottom, respectively. They were sputtered on wavy-structured substrate and had lateral dimensions ranging from 2.2 to 3.5 min in width and from I to 3 mm in length. The actuators were switched with voltages in the range of 0.2 to 0.8 V and with currents in the range of 0.2 to 0.8 A. A force of 2.2 mN with a displacement of 0.7 mm was reached. To improve the performance further, a special test setup was developed. The bistable actuators in it were sputtered on a planar substrate with lateral dimensions ranging from 6 to 8 mm in width and from 3 to 6 min in length. These actuators were switched with actuation voltages in the range of 0.6 to 1.6 V and with currents in the range of 0.6 to 1.8 A. Thus, a force of 16 mN with a displacement of 1.2 min was reached. [2007-0261]

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 Dates: 2009
 Publication Status: Issued
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 Rev. Type: -
 Identifiers: ISI: 000263123100019
ISSN: 1057-7157
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Title: Journal of Microelectromechanical Systems
  Alternative Title : J. Microelectromech. Syst.
Source Genre: Journal
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Pages: - Volume / Issue: 18 (1) Sequence Number: - Start / End Page: 186 - 194 Identifier: -