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  Enabling technologies for system-level simulation of MEMS

Bechtold, T., Schrag, G., & Feng, L. (2013). Enabling technologies for system-level simulation of MEMS. In Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) (pp. 1-6).

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0014-724D-A Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0025-6868-9
Genre: Conference Paper

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 Creators:
Bechtold, Tamara1, Author
Schrag, Gabriele2, Author
Feng, Lihong3, Author           
Affiliations:
1IMTEK, Freiburg University, Institute for Microsystems Engineering, Germany , ou_persistent22              
2Technische Universität München, Institute for Physics of Electrotechnology, Germany , ou_persistent22              
3Computational Methods in Systems and Control Theory, Max Planck Institute for Dynamics of Complex Technical Systems, Max Planck Society, ou_1738141              

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 Dates: 2013
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: DOI: 10.1109/EuroSimE.2013.6529994
 Degree: -

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Title: EuroSimE 2013 - 14th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
Place of Event: Wroclaw, Poland
Start-/End Date: 2013-04-14 - 2013-04-17

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Title: Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
Source Genre: Proceedings
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Publ. Info: -
Pages: 669 p. Volume / Issue: - Sequence Number: - Start / End Page: 1 - 6 Identifier: ISBN: 978-146736138-5