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Title:
Materials Issues and Modeling for Device Nanofabrication
Source Genre:
Book
Creator(s):
Merhari, L., Editor
Wille, L. T., Editor
Gonsalves, K. E., Editor
Gyure, M. F., Editor
Matsui, S., Editor
Whitman, L. J., Editor
Affiliations:
-
Publ. Info:
Warrendale, PA : Materials Research Society
Pages:
-
Volume / Issue:
-
Sequence Number:
-
Start / End Page:
215 - 222
Identifier:
ISBN: 1-55899-492-0