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  Optimizing the fabrication of diffractive optical elements using a focused ion beam system

Vijayakumar, A., Eigenthaler, U., Keskinbora, K., Sridharan, G. M., Pramitha, V., Hirscher, M., et al. (2014). Optimizing the fabrication of diffractive optical elements using a focused ion beam system. Proceedings of SPIE, 9130: 91300X. doi:10.1117/12.2051925.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0019-B68C-A Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0023-C9CE-C
Genre: Journal Article

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 Creators:
Vijayakumar, A.1, Author
Eigenthaler, U.2, Author           
Keskinbora, K.3, Author           
Sridharan, G. M.1, Author
Pramitha, V.1, Author
Hirscher, M.3, Author           
Spatz, J. P.4, Author           
Bhattacharya, S.1, Author
Affiliations:
1Department of Electrical Engineering, IIT Madras, Chennai 600036, India, ou_persistent22              
2Scientific Staff Assembly Dual Beam, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497668              
3Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497648              
4Dept. New Materials and Biosystems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497649              

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Free keywords: Abt. Schütz
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Language(s): eng - English
 Dates: 2014
 Publication Status: Issued
 Pages: 8
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: DOI: 10.1117/12.2051925
 Degree: -

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Title: Proceedings of SPIE
Source Genre: Journal
 Creator(s):
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Publ. Info: -
Pages: - Volume / Issue: 9130 Sequence Number: 91300X Start / End Page: - Identifier: -