English
 
Help Privacy Policy Disclaimer
  Advanced SearchBrowse

Item

ITEM ACTIONSEXPORT
 
 
DownloadE-Mail
 Local TagsRelease HistoryDetailsSummary
  Small-scale plasticity in thin Cu and Al films

Dehm, G., Balk, T. J., Edongué, H., & Arzt, E. (2003). Small-scale plasticity in thin Cu and Al films. Microelectronic Engineering, 70(2-4), 412-424.

Item is

 

show all hide all

Basic

show hide
Item Permalink: https://hdl.handle.net/21.11116/0000-0001-97EE-9 Version Permalink: https://hdl.handle.net/21.11116/0000-0001-97EF-8
Genre: Conference Paper

Files

show Files

Locators

show

Creators

show
hide
 Creators:
Dehm, Gerhard1, Author           
Balk, Thomas John1, Author           
Edongué, Hervais1, Author           
Arzt, Eduard1, Author           
Affiliations:
1Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655              

Content

show
hide
Free keywords: MPI für Metallforschung; Abt. Arzt;
 Abstract: -

Details

show
hide
Language(s): eng - English
 Dates: 2003-11
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 56103
DOI: 10.1016/S0167-9317(03)00395-2
 Degree: -

Event

show
hide
Title: Materials for Advanced Metallization 2003
Place of Event: La Londe Les Maures, France
Start-/End Date: 2003-03-09 - 2003-03-12

Legal Case

show

Project information

show

Source 1

show
hide
Title: Microelectronic Engineering
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: Amsterdam : Elsevier
Pages: - Volume / Issue: 70 (2-4) Sequence Number: - Start / End Page: 412 - 424 Identifier: ISSN: 0167-9317
CoNE: https://pure.mpg.de/cone/journals/resource/954925484690