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  Point-spread functions for backscattered imaging in the scanning electron microscope

Hennig, P. (2007). Point-spread functions for backscattered imaging in the scanning electron microscope. Journal of Applied Physics, 102(12), 1-8. doi:10.1063/1.2817591.

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Hennig, P1, Autor           
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1Department Empirical Inference, Max Planck Institute for Biological Cybernetics, Max Planck Society, ou_1497795              

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 Zusammenfassung: One knows the imaging system's properties are central to the correct interpretation of any image. In a scanning electron microscope regions of different composition generally interact in a highly nonlinear way during signal generation. Using Monte Carlo simulations we found that in resin-embedded, heavy metal-stained biological specimens staining is sufficiently dilute to allow an approximately linear treatment. We then mapped point-spread functions for backscattered-electron contrast, for primary energies of 3 and 7 keV and for different detector specifications. The point-spread functions are surprisingly well confined (both laterally and in depth) compared even to the distribution of only those scattered electrons that leave the sample again.

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 Datum: 2007-12
 Publikationsstatus: Erschienen
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 Identifikatoren: URI: http://jap.aip.org/resource/1/japiau/v102/i12/p123101_s1
DOI: 10.1063/1.2817591
BibTex Citekey: HennigD2007
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Titel: Journal of Applied Physics
Genre der Quelle: Zeitschrift
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Seiten: - Band / Heft: 102 (12) Artikelnummer: - Start- / Endseite: 1 - 8 Identifikator: -