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キーワード:
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要旨:
In order to check the predictions of 0D-models experimentally, a small coaxial discharge configuration for the generation of homogeneous high pressure glow discharges (diameter 11 mm, length 20 mm) in rare gas halogen excimer laser gas mixtures under accurately controlled conditions has been developed. It uses X-ray preionization and a special pulse-forming network (PFN) delivering fast rising (8 ns) single square pulses (U 0=25 kV; I=300 A; prop=100 ns). Discharge current and voltage are measured precisely by a capacitive voltage divider and a shunt integrated into the discharge chamber. All circuit data needed for the model calculations have been evaluated. Interferometric and spectroscopic diagnostics of the bulk of the discharge and of the cathode sheath have been performed. First results for Ne/Xe/HCl mixtures are compared with model calculations.
