Silicon micromachining technology for sub-nanogram discrete mass resonant 
biosensors

Prescesky, S.; Parameswaran, M.; Rawicz, A.; Turner, R. F. B.; Reichl, Udo

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Silicon micromachining technology for sub-nanogram discrete mass resonant biosensors

Prescesky, S., Parameswaran, M., Rawicz, A., Turner, R. F. B., & Reichl, U. (1992). Silicon micromachining technology for sub-nanogram discrete mass resonant biosensors. Canadian Journal of Physics, 70(10-11), 1178-1183.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0013-A468-0 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0024-3322-F

Genre: Journal Article

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Creators:
Prescesky, S., Author
Parameswaran, M., Author
Rawicz, A., Author
Turner, R. F. B., Author
Reichl, Udo¹, Author

Affiliations:
1Other publications of the MPI staff, Max Planck Institute for Dynamics of Complex Technical Systems, Max Planck Society, ou_1738149

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Language(s): eng - English

Dates: Date issued: 1992

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 119351

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Title: Canadian Journal of Physics

Source Genre: Journal

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Publ. Info: Ottawa : NRC Research Press

Pages: - Volume / Issue: 70 (10-11) Sequence Number: - Start / End Page: 1178 - 1183 Identifier: ISSN: 0008-4204
CoNE: https://pure.mpg.de/cone/journals/resource/954925388202