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Title:
Journal of Vacuum Science and Technology A
Other
:
J. Vac. Sci. Technol. A: Vac. Surf. Films
Source Genre:
Journal
Creator(s):
Affiliations:
Publ. Info:
New York : Published by AVS through the American Institute of Physics
Pages:
-
Volume / Issue:
21 (4)
Sequence Number:
-
Start / End Page:
1515 - 1518
Identifier:
ISSN: 0734-2101