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  Evolution of the 2D surface structure of a silicon pitch grating under argon ion bombardement: experiment and modeling

Bizyukov, I., Mutzke, A., Schneider, R., & Davis, J. (2010). Evolution of the 2D surface structure of a silicon pitch grating under argon ion bombardement: experiment and modeling. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 268(17-18), 2631-2638. doi:10.1016/j.nimb.2010.06.035.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0026-F139-C Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0026-F13A-A
Genre: Journal Article

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Bizyukov, I.1, Author           
Mutzke, A.2, Author           
Schneider, R.2, Author           
Davis, J.3, Author
Affiliations:
1External Organizations, ou_persistent22              
2Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856287              
3Karazin Kharkiv National University, Faculty of Physics and Technologies, 31 Kurchatov Ave., Kharkiv 61108, Ukraine; Institute of Physics, Ernst-Moritz-Arndt University, Felix-Hausdorff-Str. 6, 17489 Greifswald, Germany; University of Toronto Institute for Aerospace Studies, 4925 Dufferin Street, Toronto, Ontario, Canada M3H 5T6, ou_persistent22              

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Language(s): eng - English
 Dates: 2010
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 494586
DOI: 10.1016/j.nimb.2010.06.035
URI: http://dx.doi.org/10.1016/j.nimb.2010.06.035
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Title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Source Genre: Journal
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Publ. Info: Elsevier B.V.
Pages: - Volume / Issue: 268 (17-18) Sequence Number: - Start / End Page: 2631 - 2638 Identifier: -