English
 
Help Privacy Policy Disclaimer
  Advanced SearchBrowse

Item

ITEM ACTIONSEXPORT
 
 
DownloadE-Mail
  Nanometer resolution optical coherence tomography using broad bandwidth XUV and soft X-ray radiation.

Fuchs, S., Rödel, C., Blinne, A., Zastrau, U., Wünsche, M., Hilbert, V., et al. (2016). Nanometer resolution optical coherence tomography using broad bandwidth XUV and soft X-ray radiation. Scientific Reports, 6: 20658. doi:10.1038/srep20658.

Item is

Files

show Files
hide Files
:
2347542.pdf (Publisher version), 802KB
Name:
2347542.pdf
Description:
-
OA-Status:
Visibility:
Public
MIME-Type / Checksum:
application/pdf / [MD5]
Technical Metadata:
Copyright Date:
-
Copyright Info:
-
:
2347542_Suppl_1.pdf (Supplementary material), 2MB
Name:
2347542_Suppl_1.pdf
Description:
-
OA-Status:
Visibility:
Public
MIME-Type / Checksum:
application/pdf / [MD5]
Technical Metadata:
Copyright Date:
-
Copyright Info:
-
License:
-
:
2347542_Suppl_2.mov (Supplementary material), 6MB
Name:
2347542_Suppl_2.mov
Description:
-
OA-Status:
Visibility:
Public
MIME-Type / Checksum:
video/quicktime / [MD5]
Technical Metadata:
Copyright Date:
-
Copyright Info:
-
License:
-

Locators

show

Creators

show
hide
 Creators:
Fuchs, S., Author
Rödel, C., Author
Blinne, A., Author
Zastrau, U., Author
Wünsche, M., Author
Hilbert, V., Author
Glaser, L.1, Author           
Viefhaus, J., Author
Frumker, E., Author
Corkum, P., Author
Förster, E., Author
Paulus, G. G., Author
Affiliations:
1Research Group of Structural Dynamics of (Bio)Chemical Systems, MPI for Biophysical Chemistry, Max Planck Society, ou_578564              

Content

show
hide
Free keywords: -
 Abstract: Optical coherence tomography (OCT) is a non-invasive technique for cross-sectional imaging. It is particularly advantageous for applications where conventional microscopy is not able to image deeper layers of samples in a reasonable time, e.g. in fast moving, deeper lying structures. However, at infrared and optical wavelengths, which are commonly used, the axial resolution of OCT is limited to about 1 μm, even if the bandwidth of the light covers a wide spectral range. Here, we present extreme ultraviolet coherence tomography (XCT) and thus introduce a new technique for non-invasive cross-sectional imaging of nanometer structures. XCT exploits the nanometerscale coherence lengths corresponding to the spectral transmission windows of, e.g., silicon samples. The axial resolution of coherence tomography is thus improved from micrometers to a few nanometers. Tomographic imaging with an axial resolution better than 18 nm is demonstrated for layer-type nanostructures buried in a silicon substrate. Using wavelengths in the water transmission window, nanometer-scale layers of platinum are retrieved with a resolution better than 8 nm. XCT as a nondestructive method for sub-surface tomographic imaging holds promise for several applications in semiconductor metrology and imaging in the water window.

Details

show
hide
Language(s): eng - English
 Dates: 2016-02-10
 Publication Status: Published online
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: DOI: 10.1038/srep20658
 Degree: -

Event

show

Legal Case

show

Project information

show

Source 1

show
hide
Title: Scientific Reports
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: -
Pages: 6 Volume / Issue: 6 Sequence Number: 20658 Start / End Page: - Identifier: -