Characterization of α-Phase Aluminium Oxide Films Deposited by Filtered Vacuum 
Arc

Yamada-Takamura, Y.; Koch, F.; Maier, H.; Bolt, H.

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Characterization of α-Phase Aluminium Oxide Films Deposited by Filtered Vacuum Arc

Yamada-Takamura, Y., Koch, F., Maier, H., & Bolt, H. (2001). Characterization of α-Phase Aluminium Oxide Films Deposited by Filtered Vacuum Arc. Surface Coatings Technolgy, 142-144, 260-264. Retrieved from http://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TVV-43WTXCV-1H&_user=100196&_handle=V-WA-A-W-AEZ-MsSWYWW-UUW-U-AACZCYAEYW-AACVAZWDYW-WDYEYDUB-AEZ-U&_fmt=summary&_coverDate=07%2F31%2F2001&_rdoc=41&_orig=browse&_srch=%23toc%235544%232001%23998559999%23263075!&_cdi=5544&view=c&_acct=C000007558&_version=1&_urlVersion=0&_userid=100196&md5=a9e1294a24aaba9fd319f30459b79083.

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Datensatz-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-4A9E-D Versions-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-4A9F-B

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Urheber:
Yamada-Takamura, Y., Autor
Koch, F.¹, Autor
Maier, H.², Autor
Bolt, H.¹, Autor

Affiliations:
1Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328
2Max Planck Society, ou_persistent13