Time resolved laser ablation of polymers and inorganic crystals

Preuss, S.; Spaeth, M.; Stuke, M.

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Time resolved laser ablation of polymers and inorganic crystals

Preuss, S., Spaeth, M., & Stuke, M. (1994). Time resolved laser ablation of polymers and inorganic crystals. Microelectronic Engineering, 25(2-4), 313-320.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0013-04C0-A Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-EA9E-3

Genre: Journal Article

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Creators:
Preuss, S., Author
Spaeth, M.¹, Author
Stuke, M.¹, Author

Affiliations:
1Research Group of Laser Chemical Processing, MPI for biophysical chemistry, Max Planck Society, ou_578609

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Language(s): eng - English

Dates: Date issued: 1994-08

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 275978
ISI: A1994PE65000026

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Title: Microelectronic Engineering

Alternative Title : Microelectron. Eng.

Source Genre: Journal

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Pages: - Volume / Issue: 25 (2-4) Sequence Number: - Start / End Page: 313 - 320 Identifier: ISSN: 0167-9317