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  Height calibration of optical lever atomic force microscopes by simple laser interferometry

Jaschke, M., & Butt, H.-J. (1995). Height calibration of optical lever atomic force microscopes by simple laser interferometry. Review of Scientific Instruments, 66(2), 1258-1259. doi:10.1063/1.1146018.

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 Creators:
Jaschke, Manfred1, Author              
Butt, Hans-Jürgen1, Author              
Affiliations:
1Department of Biophysical Chemistry, Max Planck Institute of Biophysics, Max Planck Society, ou_2068289              

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 Abstract: A new and simple interferometric method for height calibration of AFM piezo scanners is presented. Except for a small mirror no additional equipment is required since the fixed wavelength of the laser diode is used as a calibration standard. The calibration is appliable in the range between several ten nm and several μm. Besides vertical calibration many problems of piezo elements like hysteresis, nonlinearity, creep, derating, etc. and their dependence on scan parameters or temperature can be investigated.

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Language(s): eng - English
 Dates: 1994-07-241994-10-251998-06-041995
 Publication Status: Published in print
 Pages: 2
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: DOI: 10.1063/1.1146018
 Degree: -

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Title: Review of Scientific Instruments
  Abbreviation : Rev. Sci. Instrum.
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: Melville, NY : AIP Publishing
Pages: - Volume / Issue: 66 (2) Sequence Number: - Start / End Page: 1258 - 1259 Identifier: ISSN: 0034-6748
CoNE: https://pure.mpg.de/cone/journals/resource/991042742033452