Revised formulae for sputtering data

Garcia-Rosales, C.; Eckstein, W.; Roth, J.

doi:10.1016/0022-3115(94)00376-9

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Revised formulae for sputtering data

Garcia-Rosales, C., Eckstein, W., & Roth, J. (1995). Revised formulae for sputtering data. Journal of Nuclear Materials, 218(1), 8-17. doi:10.1016/0022-3115(94)00376-9.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8F71-9 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8F72-7

Genre: Journal Article

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Creators:
Garcia-Rosales, C.¹, Author
Eckstein, W.¹, Author
Roth, J.¹, Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Language(s): eng - English

Dates: Date issued: 1995

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 628067
DOI: 10.1016/0022-3115(94)00376-9
URI: http://www.sciencedirect.com/science/article/pii/0022311594003769

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Title: Journal of Nuclear Materials

Source Genre: Journal

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Pages: - Volume / Issue: 218 (1) Sequence Number: - Start / End Page: 8 - 17 Identifier: -