MOCVD of Aluminum Oxide/Hydroxide onto Organic Self-Assembled Monolayers

Wohlfart, P.; Weiß, J.; Käshammer, J.; Kreiter, Maximilian; Winter, C.; Fischer, R.; Mittler-Neher, Silvia

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MOCVD of Aluminum Oxide/Hydroxide onto Organic Self-Assembled Monolayers

Wohlfart, P., Weiß, J., Käshammer, J., Kreiter, M., Winter, C., Fischer, R., et al. (1999). MOCVD of Aluminum Oxide/Hydroxide onto Organic Self-Assembled Monolayers. Chemical Vapor Deposition, 5, 165-170.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-000F-53D1-A Version Permalink: https://hdl.handle.net/11858/00-001M-0000-000F-53D2-8

Genre: Journal Article

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Creators:
Wohlfart, P., Author
Weiß, J., Author
Käshammer, J., Author
Kreiter, Maximilian¹, Author
Winter, C.¹, Author
Fischer, R., Author
Mittler-Neher, Silvia¹, Author

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1MPI for Polymer Research, Max Planck Society, ou_1309545

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Language(s): eng - English

Dates: Date issued: 1999

Publication Status: Issued

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Identifiers: eDoc: 327417
Other: P-99-113

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Title: Chemical Vapor Deposition

Source Genre: Journal

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Pages: - Volume / Issue: 5 Sequence Number: - Start / End Page: 165 - 170 Identifier: -