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  Hydrogen permeation barrier performance characterization of vapor deposited amorphous aluminum oxide films using coloration of tungsten oxide

Yamada-Takamura, Y., Koch, F., Maier, H., & Bolt, H. (2002). Hydrogen permeation barrier performance characterization of vapor deposited amorphous aluminum oxide films using coloration of tungsten oxide. Surface & Coatings Technology, 153(2-3), 114-118.

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Yamada-Takamura, Y.1, Author
Koch, F.2, Author              
Maier, H.3, Author
Bolt, H.2, Author              
Affiliations:
1Univ Tokyo, Dept Met & Mat Sci, Tokyo 1138656, Japan, ou_persistent22              
2Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328              
3Max Planck Society, ou_persistent13              

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 Abstract: Low hydrogen diffusivity and solubility of aluminum oxide make a vapor deposited aluminum oxide (Al2O3) film an anticipated hydrogen permeation barrier coating. In this paper, amorphous Al2O3 film was deposited using filtered vacuum arc method. As a substrate, vapor deposited amorphous tungsten oxide (WOE) film was used in order to characterize hydrogen permeation barrier performance of the Al2O3 film utilizing coloration of WOE when it forms HxWO3. The samples were exposed to the flux and angular quantified atomic hydrogen beam, and the degree of coloration was characterized by visibly: to new infrared range transmission spectroscopy. Using this method, a half-micron thick amorphous Al2O3 film reducing atomic hydrogen reaching the underlying WO3 film to 3 X 10(-4) was measured. Furthermore, Al2O3 film as thin as 20 nm showed atomic hydrogen reduction of 4 X 10(-3). The results indicate effectiveness of thin vapor depasited Al2O3 film as a permeation barrier against atomic hydrogen. (C) 2002 Elsevier Science B.V All rights reserved.

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Language(s): eng - English
 Dates: 2002-04-15
 Publication Status: Published in print
 Pages: -
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 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 23699
ISI: 000174831600004
 Degree: -

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Title: Surface & Coatings Technology
  Alternative Title : Surf. Coat. Technol.
Source Genre: Journal
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Pages: - Volume / Issue: 153 (2-3) Sequence Number: - Start / End Page: 114 - 118 Identifier: ISSN: 0257-8972