Microstructural size effects on the hardness of nanocrystalline 
TiN/amorphous-SiNx coatings prepared by magnetron sputtering

Kauffmann, Florian; Dehm, Gerhard; Schier, Veit; Schattke, Alexander; Beck, Tobias; Lang, Stéphane; Arzt, Eduard

doi:10.1016/j.tsf.2004.08.080

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Microstructural size effects on the hardness of nanocrystalline TiN/amorphous-SiN_x coatings prepared by magnetron sputtering

Kauffmann, F., Dehm, G., Schier, V., Schattke, A., Beck, T., Lang, S., et al. (2005). Microstructural size effects on the hardness of nanocrystalline TiN/amorphous-SiN_x coatings prepared by magnetron sputtering. Thin Solid Films, 473(1), 114-122. doi:10.1016/j.tsf.2004.08.080.

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Item Permalink: https://hdl.handle.net/21.11116/0000-0001-7EAE-F Version Permalink: https://hdl.handle.net/21.11116/0000-0001-7EAF-E

Genre: Journal Article

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Creators:
Kauffmann, Florian¹, Author
Dehm, Gerhard¹, Author
Schier, Veit², Author
Schattke, Alexander³, Author
Beck, Tobias⁴, Author
Lang, Stéphane², Author
Arzt, Eduard^{1, 5}, Author

Affiliations:
1Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655
2Walter AG, Derendinger Str. 53, 72072 Tübingen, Germany, persistent22
3Robert Bosch GmbH, Postfach 10 60 50, 70049 Stuttgart, Germany, persistent22
4Dept. Metastable and Low-Dimensional Materials, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497645
5Universität Stuttgart, Institut für Metallkunde, ou_persistent22

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Language(s): eng - English

Dates: Date issued: 2005-02-01

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 240307
DOI: 10.1016/j.tsf.2004.08.080

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Title: Thin Solid Films

Abbreviation : Thin Solid Films

Source Genre: Journal

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Publ. Info: Lausanne, Switzerland, etc. : Elsevier

Pages: - Volume / Issue: 473 (1) Sequence Number: - Start / End Page: 114 - 122 Identifier: ISSN: 0040-6090
CoNE: https://pure.mpg.de/cone/journals/resource/954925449792