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  Thermal Characterization of Dynamic Silicon Cantilever Array Sensors by Digital Holographic Microscopy

Zakerin, M., Novak, A., Toda, M., Emery, Y., Natalio, F., Butt, H.-J., et al. (2017). Thermal Characterization of Dynamic Silicon Cantilever Array Sensors by Digital Holographic Microscopy. Sensors, 17(6): 1191. doi:10.3390/s17061191.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-002D-BA48-9 Version Permalink: https://hdl.handle.net/21.11116/0000-0002-06D0-C
Genre: Journal Article

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 Creators:
Zakerin, Marjan1, Author           
Novak, A., Author
Toda, Masaya2, Author           
Emery, Y., Author
Natalio, F., Author
Butt, Hans-Jürgen1, Author           
Berger, Rüdiger1, Author           
Affiliations:
1Dept. Butt: Physics at Interfaces, MPI for Polymer Research, Max Planck Society, ou_1800286              
2Tohoku Univ, Grad Sch Engn, Aoba Ku, Sendai, Miyagi 9808579, Japan, ou_persistent22              

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Language(s): eng - English
 Dates: 2017
 Publication Status: Issued
 Pages: -
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 Table of Contents: -
 Rev. Type: -
 Identifiers: DOI: 10.3390/s17061191
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Title: Sensors
Source Genre: Journal
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Publ. Info: MDPI
Pages: - Volume / Issue: 17 (6) Sequence Number: 1191 Start / End Page: - Identifier: Other: 1424-8220
CoNE: https://pure.mpg.de/cone/journals/resource/1424-8220