Microstructural size effects on the hardness of nanocrystalline 
TiN/amorphous-SiNx coatings prepared by magnetron sputtering

Kauffmann, F.; Dehm, G.; Schier, V.; Schattke, A.; Beck, T.; Lang, S.; Arzt, E.

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Microstructural size effects on the hardness of nanocrystalline TiN/amorphous-SiN_x coatings prepared by magnetron sputtering

Kauffmann, F., Dehm, G., Schier, V., Schattke, A., Beck, T., Lang, S., et al. (2005). Microstructural size effects on the hardness of nanocrystalline TiN/amorphous-SiN_x coatings prepared by magnetron sputtering. Thin Solid Films, 473(1), 114-122.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-26E8-F Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-26E9-D

Genre: Journal Article

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Creators:
Kauffmann, F.¹, Author
Dehm, G.¹, Author
Schier, V.², Author
Schattke, A.², Author
Beck, T.³, Author
Lang, S.², Author
Arzt, E.^{1, 4}, Author

Affiliations:
1Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655
2Walter AG, Derendinger Str. 53, Postfach 20 49, 72072 Tübingen, Germany Robert Bosch GmbH, Postfach 10 60 50, 70049 Stuttgart, Germany, ou_persistent22
3Dept. Metastable and Low-Dimensional Materials, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497645
4Universität Stuttgart, Institut für Metallkunde, ou_persistent22

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Free keywords: MPI für Metallforschung; Abt. Arzt;

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Language(s): eng - English

Dates: Date issued: 2005-02-01

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 240307

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Title: Thin Solid Films

Source Genre: Journal

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Pages: - Volume / Issue: 473 (1) Sequence Number: - Start / End Page: 114 - 122 Identifier: -