Quantitative characterization of dislocation structure coupled with 
electromigration in a passivated Al(0.5wt% Cu) interconnect

Barabash, R. I.; Ice, G. E.; Tamura, N.; Valek, B. C.; Bravman, J. C.; Spolenak, R.; Patel, J. R.

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Quantitative characterization of dislocation structure coupled with electromigration in a passivated Al(0.5wt% Cu) interconnect

Barabash, R. I., Ice, G. E., Tamura, N., Valek, B. C., Bravman, J. C., Spolenak, R., et al. (2003). Quantitative characterization of dislocation structure coupled with electromigration in a passivated Al(0.5wt% Cu) interconnect. In A. Kerrow, J. Lelu, O. Kraft, & T. Kikkawa (Eds.), Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics (pp. 107-114). Warrendale, Pa.: MRS.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2E06-7 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2E07-5

Genre: Conference Paper

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Creators:
Barabash, R. I., Author
Ice, G. E., Author
Tamura, N., Author
Valek, B. C., Author
Bravman, J. C., Author
Spolenak, R.¹, Author
Patel, J. R., Author

Affiliations:
1Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655

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Free keywords: MPI für Metallforschung; Abt. Arzt;

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Language(s): eng - English

Dates: Date issued: 2003

Publication Status: Issued

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Rev. Type: -

Identifiers: eDoc: 55934

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Title: Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics. Symposium at the 2003 Spring Meeting

Place of Event: San Francisco, Calif.

Start-/End Date: 2003-04-21 - 2003-04-25

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Title: Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics

Source Genre: Proceedings

Creator(s):
Kerrow, A., Editor
Lelu, J., Editor
Kraft, O.¹, Editor
Kikkawa, T., Editor

Affiliations:
1 Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655

Publ. Info: Warrendale, Pa. : MRS

Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 107 - 114 Identifier: -

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Title: Materials Research Society Symposium Proceedings

Source Genre: Series

Creator(s):
Materials Research Society, Editor

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-

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Pages: - Volume / Issue: - Sequence Number: - Start / End Page: - Identifier: -