ECR Waveguide Discharge for Inner Coating of Metal Tubes

Hytry, R.; Moeller, W.; Wilhelm, R.

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ECR Waveguide Discharge for Inner Coating of Metal Tubes

Hytry, R., Moeller, W., & Wilhelm, R. (1991). ECR Waveguide Discharge for Inner Coating of Metal Tubes. In U. Ehlemann, H. G. Lergon, & K. Wiesemann (Eds.), 10th International Symposium on Plasma Chemistry, Symposium Proceedings.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-9670-0 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-9671-E

Genre: Conference Paper

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Creators:
Hytry, R.¹, Author
Moeller, W.¹, Author
Wilhelm, R.², Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
2Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856318

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Language(s): eng - English

Dates: Date issued: 1991

Publication Status: Issued

Pages: -

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Table of Contents: -

Rev. Type: Internal

Identifiers: eDoc: 630156

Degree: -

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Title: 10th International Symposium on Plasma Chemistry (ISPC 10)

Place of Event: Bochum (DE)

Start-/End Date: 1991-08-04 - 1991-08-09

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Title: 10th International Symposium on Plasma Chemistry, Symposium Proceedings

Source Genre: Proceedings

Creator(s):
Ehlemann, U., Editor
Lergon, H. G., Editor
Wiesemann, K., Editor

Affiliations:
-

Publ. Info: -

Pages: - Volume / Issue: - Sequence Number: 2.1-16 Start / End Page: - Identifier: -