Liquid precursor 2-step aluminum thin film deposition on KrF laser patterned 
palladium.

Lehmann, O.; Stuke, M.

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Liquid precursor 2-step aluminum thin film deposition on KrF laser patterned palladium.

Lehmann, O., & Stuke, M. (1992). Liquid precursor 2-step aluminum thin film deposition on KrF laser patterned palladium. Applied Physics Letters, 61(17), 2027-2029.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0013-08C1-E Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-DE88-3

Genre: Journal Article

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Creators:
Lehmann, O.¹, Author
Stuke, M.¹, Author

Affiliations:
1Research Group of Laser Chemical Processing, MPI for biophysical chemistry, Max Planck Society, ou_578609

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Language(s): eng - English

Dates: Date issued: 1992-10-26

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 281390
ISI: A1992JV04100010

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Title: Applied Physics Letters

Alternative Title : Appl. Phys. Lett.

Source Genre: Journal

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Pages: - Volume / Issue: 61 (17) Sequence Number: - Start / End Page: 2027 - 2029 Identifier: ISSN: 0003-6951