Sheath dynamics in capacitively coupled RF plasmas

Dittmann, K.; Matyash, K.; Schneider, R.; Meichsner, J.

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Sheath dynamics in capacitively coupled RF plasmas

Dittmann, K., Matyash, K., Schneider, R., & Meichsner, J. (2009). Sheath dynamics in capacitively coupled RF plasmas. Talk presented at DPG Frühjahrstagung. Greifswald. 2009-03-30 - 2009-04-02.

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Datensatz-Permalink: https://hdl.handle.net/21.11116/0000-0000-4DD4-B Versions-Permalink: https://hdl.handle.net/21.11116/0000-0000-4DD5-A

Genre: Vortrag

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Urheber:
Dittmann, K.¹, Autor
Matyash, K.^{2, 3}, Autor
Schneider, R.^{3, 4}, Autor
Meichsner, J.¹, Autor

Affiliations:
1University of Greifswald, Institute of Physics, Greifswald, Germany, ou_persistent22
2Helmholtz Junior Research Group 'Computational Material Science' (Junior Research Group HGF-Greifswald), Max Planck Institute for Plasma Physics, Max Planck Society
3Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856287
4Helmholtz Junior Research Group 'Computational Material Science' (Junior Research Group HFG-Greifswald), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856336