Surface stress control using ultraviolet light irradiation of 
plasma-polymerized thin films

Igarashi, S.; Itakura, A. N.; Kitajima, M.; Chifen, A. N.; Förch, Renate; Berger, Rüdiger

doi:10.1063/1.2183807

Local TagsRelease HistoryDetailsSummary

Surface stress control using ultraviolet light irradiation of plasma-polymerized thin films

Igarashi, S., Itakura, A. N., Kitajima, M., Chifen, A. N., Förch, R., & Berger, R. (2006). Surface stress control using ultraviolet light irradiation of plasma-polymerized thin films. Applied Physics Letters, 88(14): 143119. doi:10.1063/1.2183807.

Item is Released

show all hide all

Basic

show hide

Item Permalink: https://hdl.handle.net/11858/00-001M-0000-000F-7F74-9 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0029-50A6-A

Genre: Journal Article

Files

show Files

Locators

show

Creators

show

hide

Creators:
Igarashi, S., Author
Itakura, A. N., Author
Kitajima, M., Author
Chifen, A. N.¹, Author
Förch, Renate¹, Author
Berger, Rüdiger¹, Author

Affiliations:
1MPI for Polymer Research, Max Planck Society, ou_1309545

Content

show

Details

show

hide

Language(s): eng - English

Dates: Published in Print: 2006

Publication Status: Published in print

Pages: -

Publishing info: -

Table of Contents: -

Rev. Type: -

Identifiers: eDoc: 264601
Other: P-06-46
DOI: 10.1063/1.2183807

Degree: -

Event

show

Legal Case

show

Project information

show

Source 1

show

hide

Title: Applied Physics Letters

Abbreviation : Appl. Phys. Lett.

Source Genre: Journal

Creator(s):

Affiliations:

Publ. Info: Melville, NY : American Institute of Physics

Pages: - Volume / Issue: 88 (14) Sequence Number: 143119 Start / End Page: - Identifier: Other: 0003-6951
CoNE: https://pure.mpg.de/cone/journals/resource/954922836223