Surface morphologies in polymers by irradiation with argon ions and consecutive 
swelling

Büscher, K.; Berger, Rüdiger; Brünger, W.; Graf, Karlheinz

doi:10.1016/j.mee.2006.01.007

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Surface morphologies in polymers by irradiation with argon ions and consecutive swelling

Büscher, K., Berger, R., Brünger, W., & Graf, K. (2006). Surface morphologies in polymers by irradiation with argon ions and consecutive swelling. Microelectronic Engineering, 83(4-9), 819-822. doi:10.1016/j.mee.2006.01.007.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-000F-7FC9-D Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0029-5B07-5

Genre: Journal Article

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Creators:
Büscher, K.¹, Author
Berger, Rüdiger¹, Author
Brünger, W., Author
Graf, Karlheinz¹, Author

Affiliations:
1MPI for Polymer Research, Max Planck Society, ou_1309545

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Language(s): eng - English

Dates: Date issued: 2006

Publication Status: Issued

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Identifiers: eDoc: 275606
Other: P-06-106
DOI: 10.1016/j.mee.2006.01.007

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Title: Microelectronic Engineering

Source Genre: Journal

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Publ. Info: Amsterdam : Elsevier

Pages: - Volume / Issue: 83 (4-9) Sequence Number: - Start / End Page: 819 - 822 Identifier: ISSN: 0167-9317
CoNE: https://pure.mpg.de/cone/journals/resource/954925484690