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キーワード:
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要旨:
The gain characteristics of a discharge-pumped ArF excimer amplifier are measured with ~700-fs-long pulses. The small-signal gain and saturation energy are found to be 0.17 cm-1 and 3.65 ± 0.15 mJ/cm2, respectively. The maximum output energy density extracted from the deeply saturated amplifier is as much as 10 mJ/cm2. The demonstrated femtosecond gain characteristics of ArF indicate that, by utilizing sufficiently high seed pulse energies, the ArF excimer laser is expected to show a performance similar to a femtosecond high-brightness KrF excimer laser system.
