English
 
User Manual Privacy Policy Disclaimer Contact us
  Advanced SearchBrowse

Item

ITEM ACTIONSEXPORT
 
 
DownloadE-Mail
  Microstructural size effects on the hardness of nanocrystalline TiN/amorphous-SiNx coatings prepared by magnetron sputtering

Kauffmann, F., Dehm, G., Schier, V., Schattke, A., Beck, T., Lang, S., et al. (2005). Microstructural size effects on the hardness of nanocrystalline TiN/amorphous-SiNx coatings prepared by magnetron sputtering. Thin Solid Films, 473(1), 114-122.

Item is

Basic

show hide
Item Permalink: http://hdl.handle.net/11858/00-001M-0000-0010-26E8-F Version Permalink: http://hdl.handle.net/11858/00-001M-0000-0010-26E9-D
Genre: Journal Article

Files

show Files

Locators

show

Creators

show
hide
 Creators:
Kauffmann, F.1, Author              
Dehm, G.1, Author              
Schier, V.2, Author
Schattke, A.2, Author
Beck, T.3, Author              
Lang, S.2, Author
Arzt, E.1, 4, Author              
Affiliations:
1Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655              
2Walter AG, Derendinger Str. 53, Postfach 20 49, 72072 Tübingen, Germany Robert Bosch GmbH, Postfach 10 60 50, 70049 Stuttgart, Germany, ou_persistent22              
3Dept. Metastable and Low-Dimensional Materials, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497645              
4Universität Stuttgart, Institut für Metallkunde, ou_persistent22              

Content

show
hide
Free keywords: MPI für Metallforschung; Abt. Arzt;
 Abstract: -

Details

show
hide
Language(s): eng - English
 Dates: 2005-02-01
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 240307
 Degree: -

Event

show

Legal Case

show

Project information

show

Source 1

show
hide
Title: Thin Solid Films
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: -
Pages: - Volume / Issue: 473 (1) Sequence Number: - Start / End Page: 114 - 122 Identifier: -