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  Hillock formation and thermal stresses in thin Au films on Si substrates

Sauter, L., Balk, T. J., Dehm, G., Nucci, J. A., & Arzt, E. (2005). Hillock formation and thermal stresses in thin Au films on Si substrates. In T. Buchheit, A. M. Minor, R. Spolenak, & K. Takashima (Eds.), Thin Films—Stresses and Mechanical Properties XI (pp. O5.2.2-O5.2.6). Warrendale, Pa.: Materials Research Society.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-286A-8 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-286B-6
Genre: Conference Paper

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 Creators:
Sauter, L.1, Author           
Balk, T. J.1, Author           
Dehm, G.1, Author           
Nucci, J. A.1, Author           
Arzt, E.1, 2, Author           
Affiliations:
1Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655              
2Universität Stuttgart, Institut für Metallkunde, ou_persistent22              

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Free keywords: MPI für Metallforschung; Abt. Arzt; thin films, Au, hillocks, stress
 Abstract: -

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Language(s): eng - English
 Dates: 2005
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: -
 Identifiers: eDoc: 248774
 Degree: -

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Title: Thin Films—Stresses and Mechanical Properties XI. Symposium O from the MRS Spring 2005
Place of Event: San Francisco, California
Start-/End Date: 2005-03-28 - 2005-04-01

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Title: Thin Films—Stresses and Mechanical Properties XI
Source Genre: Proceedings
 Creator(s):
Buchheit, T.E., Editor
Minor, A. M., Editor
Spolenak, R.1, Editor           
Takashima, K., Editor
Affiliations:
1 Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655            
Publ. Info: Warrendale, Pa. : Materials Research Society
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: O5.2.2 - O5.2.6 Identifier: -

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Title: Materials Research Society Symposium Proceedings
Source Genre: Series
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Affiliations:
Publ. Info: -
Pages: - Volume / Issue: 875 Sequence Number: - Start / End Page: - Identifier: -