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  Spatially resolved characterization of electromigration-induced plastic deformation in Al(0.5wt% Cu) interconnect

Barabash, R. I., Ice, G. E., Tamura, N., Valek, B. C., Spolenak, R., & Patel, R. (2003). Spatially resolved characterization of electromigration-induced plastic deformation in Al(0.5wt% Cu) interconnect. In J. Pinqueras (Ed.), Spatially Resolved Characterization of Local Phenomena in Materials and Nanostructures (pp. G13.1.1-G13.1.6). Warrendale, Pa.: MRS.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2E04-B Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2E05-9
Genre: Conference Paper

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 Creators:
Barabash, R. I., Author
Ice, G. E., Author
Tamura, N., Author
Valek, B. C., Author
Spolenak, R.1, Author           
Patel, R., Author
Affiliations:
1Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655              

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Free keywords: MPI für Metallforschung; Abt. Arzt;
 Abstract: -

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Language(s): eng - English
 Dates: 2003
 Publication Status: Issued
 Pages: -
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 Table of Contents: -
 Rev. Type: -
 Identifiers: eDoc: 55933
 Degree: -

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Title: Spatially Resolved Characterization of Local Phenomena in Materials and Nanostructures. MRS Symposium
Place of Event: Boston, Mass., USA
Start-/End Date: 2002-12-02 - 2002-12-06

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Title: Spatially Resolved Characterization of Local Phenomena in Materials and Nanostructures
Source Genre: Proceedings
 Creator(s):
Pinqueras, J., Editor
Affiliations:
-
Publ. Info: Warrendale, Pa. : MRS
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: G13.1.1 - G13.1.6 Identifier: -

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Title: Materials Research Society Symposium Proceedings
Source Genre: Series
 Creator(s):
Materials Research Society, Editor  
Affiliations:
-
Publ. Info: -
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: - Identifier: -