Electromigration in Metallization Layers

Spolenak, R.; Wendrock, H.; Wetzig, K.

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Electromigration in Metallization Layers

Spolenak, R., Wendrock, H., & Wetzig, K. (2003). Electromigration in Metallization Layers. In K. Wetzig, & C. M. Schneider (Eds.), Metal Based Thin Films for Electronics (pp. 205-221). Weinheim: Wiley-VCH.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2E1B-8 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2E1C-6

Genre: Book Chapter

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Creators:
Spolenak, R.¹, Author
Wendrock, H., Author
Wetzig, K., Author

Affiliations:
1Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655

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Free keywords: MPI für Metallforschung; Abt. Arzt;

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Language(s): eng - English

Dates: Date issued: 2003

Publication Status: Issued

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Identifiers: eDoc: 56055

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Title: Metal Based Thin Films for Electronics

Source Genre: Book

Creator(s):
Wetzig, K., Editor
Schneider, C. M., Editor

Affiliations:
-

Publ. Info: Weinheim : Wiley-VCH

Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 205 - 221 Identifier: -