Small-scale plasticity in thin Cu and Al films

Dehm, G.; Balk, T. J.; Edongue, H.; Arzt, E.

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Small-scale plasticity in thin Cu and Al films

Dehm, G., Balk, T. J., Edongue, H., & Arzt, E. (2003). Small-scale plasticity in thin Cu and Al films. Microelectronic Engineering, 70(2-4), 412-424.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2E21-7 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-2E22-5

Genre: Journal Article

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Creators:
Dehm, G.¹, Author
Balk, T. J.¹, Author
Edongue, H.^{1, 2}, Author
Arzt, E.^{1, 3}, Author

Affiliations:
1Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497655
2Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497657
3Universität Stuttgart, Institut für Metallkunde, ou_persistent22

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Free keywords: MPI für Metallforschung; Abt. Arzt;

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Language(s): eng - English

Dates: Date issued: 2003

Publication Status: Issued

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Identifiers: eDoc: 56103

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Title: Microelectronic Engineering

Source Genre: Journal

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Pages: - Volume / Issue: 70 (2-4) Sequence Number: - Start / End Page: 412 - 424 Identifier: -